Submicron stage for Z-axis FS-1005Z/1010Z
Precision positioning device: A Z-axis positioning stage with high resolution of 50nm or 100nm, excellent positioning reproducibility, and high position retention after positioning!
This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis systems, and, combined with our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111
- Company：シグマ光機
- Price：Other
